Abstract

In this paper, we present a miniature fiber-optic Fabry–Pérot interferometric pressure sensor based on an in situ printed fiber-top air cavity. With an in-house optical 3D μ-printing setup, a suspended SU-8 diaphragm with light scatter is directly printed on the end face of standard optical fiber to form a sealed Fabry–Pérot cavity. The fabricated Fabry–Pérot microinterferometer shows a linear response to the change of pressure with a sensitivity of 2.93 nm/MPa in the range of 0 ∼ 700 kPa. The response of the sensor to the change of temperature in the range from 30 °C to 65 °C is measured to be ∼38 pm/°C. Such an ultra-small fiber-optic pressure sensor has remote monitoring capability and is promising for a great number of measurement and testing applications ranging from miniature manometers to bioprobes.

© 2018 IEEE

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