Abstract

InP-based high-power and high-speed modified unitraveling carrier photodiodes heterogeneously integrated on silicon-on-insulator waveguides are demonstrated. Internal responsivity up to 0.95A/W and bandwidth up to 48 GHz have been achieved. The maximum RF output power of a $20 \times 35$ μm² photodiode was 16.6, 15.8, and 13.5 dBm at 10, 20, and 30 GHz, respectively. The maximum output RF power of a $10 \times 35$ μm² photodiode was 12 dBm at 40 GHz. Using the same integration technology, we show that balanced waveguide photodiodes reach 0.78-A/W internal responsivity, 14-GHz bandwidth, and >20-dB common-mode rejection ratio. In the differential mode, the unsaturated RF output power was 17.2 dBm at 10 GHz and 15.2 dBm at 20 GHz.

© 2015 IEEE

InP-based waveguide photodiodes heterogeneously integrated on silicon-on-insulator for photonic microwave generation

Andreas Beling, Allen S. Cross, Molly Piels, Jon Peters, Qiugui Zhou, John E. Bowers, and Joe C. Campbell
Opt. Express 21(22) 25901-25906 (2013)

Heterogeneous photodiodes on silicon nitride waveguides

Qianhuan Yu, Junyi Gao, Nan Ye, Baiheng Chen, Keye Sun, Linli Xie, Kartik Srinivasan, Michael Zervas, Gabriele Navickaite, Michael Geiselmann, and Andreas Beling
Opt. Express 28(10) 14824-14830 (2020)

Indium arsenide quantum dot waveguide photodiodes heterogeneously integrated on silicon

Bassem Tossoun, Géza Kurczveil, Chong Zhang, Antoine Descos, Zhihong Huang, Andreas Beling, Joe C. Campbell, Di Liang, and Raymond G. Beausoleil
Optica 6(10) 1277-1281 (2019)

Improved power conversion efficiency in high-performance photodiodes by flip-chip bonding on diamond

Xiaojun Xie, Qiugui Zhou, Kejia Li, Yang Shen, Qinglong Li, Zhanyu Yang, Andreas Beling, and Joe C. Campbell
Optica 1(6) 429-435 (2014)

High saturation photocurrent THz waveguide-type MUTC-photodiodes reaching mW output power within the WR3.4 band

Marcel Grzeslo, Sebastian Dülme, Simone Clochiatti, Tom Neerfeld, Thomas Haddad, Peng Lu, Jonas Tebart, Sumer Makhlouf, Carlos Biurrun-Quel, José Luis Fernández Estévez, Jörg Lackmann, Nils Weimann, and Andreas Stöhr
Opt. Express 31(4) 6484-6498 (2023)