Abstract
Directly bonded, oxide-free, InP-based epitaxial layer bonding onto nanopatterned silicon-on-insulator
structures was performed and result in waveguides with an embedded effective medium. Such a medium ensures flexible
form of optical confinement and could also assist heat and electric current transfer optimally to the silicon layer
since there is a remarkable absence of oxide, thanks to careful surface preparation processes. The fabricated
waveguides, which embed buried 1-D (trenches) or 2-D (holes forming a photonic crystal) nanopatterns have been
measured by two techniques. Either the classical end-fire technique, or the “internal light source”
technique used for III–V-based photonic crystal waveguides, with a layer that contains several quantum wells.
Propagation losses due to scattering in the nanopatterned area are retrieved by both methods and consistently point
toward a ∼20 cm
$^{-1}$
loss level. A critical assessment
is made of this result. Other local probe techniques allowed by the internal probe methods are reported that could
help qualifying thermal transfer at these oxide-free interfaces.
© 2013 IEEE
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