Abstract
The application of spectroscopic ellipsometry for the characterization
of UV-patterned channel waveguides to obtain the refractive index contrast
and surface deformation profile is presented. Thin films were prepared with
organic–inorganic di-ureasils hybrids modified with zirconium tetra-propoxide
deposited in silica on silicon substrates. The channel waveguides were produced
by direct writing using UV laser radiation. The refractive index contrast
and the surface ablation induced by the UV optical signal were estimated by
ellipsometry being 4.5
x 10<sup>-3</sup> and 30.5 nm, respectively. The deepness of
the surface ablation due to the UV exposition was also estimated by atomic
force microscopy measurements that pointed out a value of 31.0 ± 1.0 nm, concordant with the
ellipsometric calculations. The near-field intensity technique was used as
a support for contextualizing the proposed ellipsometry method for the characterization
of refractive index profiles. The estimated refractive index contrast (2.0 x 10<sup>-3</sup>) is
in a good agreement with the refractive index contrast derived from ellipsometry.
© 2011 IEEE
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