Abstract
We demonstrate highly compact optical add–drop filters based on
silicon-on-insulator microring resonators. The microring resonators have a
small radius of 2.5 μm and a very large free spectral range ~ at the 1.55 μm communication band. The propagation loss
in such small micoring resonators was experimentally determined and shown
to be extremely important in designing microring add–drop filters with
low add–drop crosstalk, low drop loss, and maximally flat drop passband.
For box-like channel dropping responses, second-order optical add–drop
filters with two coupled microring resonators are designed and demonstrated,
and the simulation matches well with the experiment. Devices were patterned
with electron-beam lithography. Two fabrication procedures utilizing different
polarity of resists were introduced and compared, and the process with negative
resist resulted in much smaller sidewall roughness of waveguides, thus reducing
the propagation loss in microring resonators.
© 2008 IEEE
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