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Optica Publishing Group
  • Journal of Lightwave Technology
  • Vol. 22,
  • Issue 5,
  • pp. 1327-
  • (2004)

Laser-Induced Fracturing: An Alternative to Mechanical Polishing and Patterning of LiNbO3 Integrated Optics Chips

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Abstract

We report a method for cutting z-oriented LiNbO3 substrates into nearly arbitrary shapes using a pulsed UV laser to controllably fracture the crystal. The end surfaces appear optically smooth. Ti-diffused waveguides terminated using this technique have fiber-waveguide-fiber insertion losses which are equal to the lowest values reported for waveguide end faces prepared using conventional mechanical polishing techniques.

© 2004 IEEE

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